The MIC Ion Microprobe started operation in late August 2000. The beam line is installed at the 10° exit port of the 2 MeV Tandetron accelerator. It is equipped with motor driven slits, a precise five-axis goniometer and a spherically shaped measuring chamber with 2 optical microscopes and detectors for PIXE, PESA, SE, RBS and STIM.

Test measurements performed on a copper grid yielded a spatial resolution of 1.0 x 1.5 microns in the high current mode (30 -100 pA) and 0.5 x 0.9 microns in low current mode (104 counts per second).

Below is the image of the 12.5 micron copper grid in the low current mode.

micro beam Cu grid micro-beam softwere

A Lab View code was developed to control the motorized 5 axes goniometer and to handle the video signal of camera showing the actual measuring site. The program enables fast, simple and precise moving of the sample.

We use microbeam in micromachining and 2D (3D) profiling applications.

Contact person:

Dr. Primož Pelicon

Last updated: 01/22/2014